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mrzamani

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June 1, 2018
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June 1, 2018

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Iron (III) Chloride to dissolve copper?

mrzamani replied to jowrose's topic in Inorganic Chemistry

Hi everyone, Do you know if the Cu FeCl3 etches silicon or not? I have ~40nm copper on a patterned silicon wafer. I am hoping to remove the copper without damaging my patterns. Any suggestions are welcome. Thanks.
- June 1, 2018
- 6 replies

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