Indium nitride

[asluveeran]

Can anyone help me by sharing info on fabrication of gas sensors using indium nitride

[Enthalpy]

Welcome!

 

Gas sensors, no, sorry... But in case this helps, the fantastic website at Ioffe:

http://www.ioffe.rssi.ru/SVA/NSM/Semicond/

has data about indium nitride.

 

The searchwords give 10,000 hits, so it's a fairly common subject:

"Indium nitride" "gas sensor"

looks like usual thin-film methods, amorphous and 10nm thick.

I've just seen a response time in hours in one paper, less nice.